Time SUM DETrms R0cm ZDR0 Eldg XTilt YTilt Focus Astig1 Astig2 Coma1 Coma2 5856867 373333.0 1.087 2.4 2.6 64.9 +0.001 -0.003 -0.099 +0.015 +0.277 +0.028 +0.134 5862524 470839.7 0.145 6.9 7.6 64.9 +0.000 -0.000 -0.001 -0.004 +0.015 +0.010 +0.013 5868185 498103.7 0.138 12.8 14.1 64.9 -0.001 -0.000 -0.020 -0.011 +0.008 -0.003 +0.002 5873866 425803.0 0.145 4.5 5.0 64.9 -0.005 +0.002 +0.005 +0.038 +0.026 +0.008 +0.029 5879545 476527.6 0.146 5.4 5.9 64.9 -0.009 -0.003 +0.022 +0.031 +0.020 +0.014 +0.040 5885214 482073.9 0.132 7.0 7.8 65.0 -0.003 -0.000 -0.004 -0.001 +0.028 +0.005 +0.013 5890885 427202.7 0.134 6.8 7.5 65.0 +0.002 +0.002 -0.008 -0.007 +0.015 +0.004 +0.008 5896553 481306.9 0.140 9.8 10.8 65.0 -0.003 +0.000 +0.006 +0.006 +0.013 +0.010 +0.024 5902234 422720.4 0.147 7.9 8.7 65.0 -0.002 +0.005 -0.009 -0.004 +0.024 -0.001 +0.016 5907920 405752.4 0.150 4.7 5.2 65.0 +0.005 +0.001 +0.002 +0.007 +0.011 +0.008 +0.007 5913582 452891.3 0.137 7.8 8.6 65.0 +0.001 +0.004 -0.008 -0.004 +0.006 +0.007 +0.011 5919254 444333.3 0.141 8.0 8.9 65.1 -0.002 +0.004 -0.009 -0.006 +0.012 -0.001 +0.014 5924917 533851.2 0.132 8.7 9.5 65.1 -0.003 -0.006 +0.012 +0.027 +0.009 +0.016 +0.028 5930594 510359.7 0.132 8.6 9.4 65.1 +0.004 -0.003 -0.002 +0.005 +0.029 +0.016 +0.006 5936268 499551.8 0.133 8.5 9.4 65.1 +0.002 +0.001 -0.006 -0.016 +0.016 +0.010 +0.002 5941936 518699.5 0.138 3.7 4.0 65.1 -0.004 +0.001 +0.011 +0.019 +0.009 +0.003 +0.027 5947607 542209.9 0.127 7.8 8.6 65.2 +0.003 -0.001 +0.000 +0.009 +0.018 +0.013 +0.006 5953288 524524.8 0.145 7.3 8.0 65.2 -0.009 -0.001 +0.004 +0.015 +0.003 +0.013 +0.033 5958956 512656.0 0.143 8.7 9.6 65.2 +0.002 -0.001 -0.006 +0.003 +0.023 +0.006 +0.006 5964668 491568.2 0.146 6.3 6.9 65.2 +0.006 -0.001 -0.015 -0.021 +0.019 +0.007 -0.005 5970258 527562.0 0.148 5.7 6.2 65.2 +0.010 +0.001 -0.004 +0.005 +0.019 +0.004 -0.009 5975977 491071.9 0.155 8.7 9.6 65.2 -0.000 -0.003 +0.001 -0.005 +0.015 +0.015 +0.008 5981648 512425.9 0.153 8.2 9.1 65.3 +0.000 +0.001 +0.001 -0.005 +0.024 +0.013 +0.014 5987318 517158.8 0.146 8.3 9.2 65.3 -0.002 -0.003 +0.006 -0.002 +0.014 +0.017 +0.018 5993008 497498.3 0.142 7.8 8.6 65.3 +0.000 +0.001 -0.008 +0.001 +0.012 +0.006 +0.009 5998661 495737.8 0.137 11.4 12.5 65.3 +0.002 +0.000 -0.009 +0.003 +0.019 +0.004 +0.004 6004328 500678.8 0.130 8.7 9.5 65.3 +0.002 +0.001 -0.001 -0.005 +0.015 +0.006 +0.004 6009001 525628.6 0.126 7.3 8.0 65.3 +0.000 +0.000 +0.002 +0.005 +0.019 +0.013 +0.015 6015671 476097.0 0.145 6.8 7.5 65.4 -0.003 +0.003 +0.005 +0.007 +0.014 +0.004 +0.018 6021342 488867.2 0.135 6.9 7.6 65.4 -0.003 +0.001 -0.001 +0.002 +0.008 +0.001 +0.016 6027013 494194.3 0.134 10.5 11.6 65.4 +0.005 +0.002 -0.007 -0.021 +0.012 +0.006 -0.001 6032691 458588.8 0.144 4.8 5.3 65.4 -0.008 -0.000 +0.006 +0.006 +0.011 +0.016 +0.034 6038361 510341.8 0.136 18.2 20.0 65.4 -0.001 +0.002 -0.005 -0.013 +0.003 -0.002 +0.008 6044034 520453.4 0.139 10.0 11.0 65.5 -0.002 +0.001 -0.009 -0.009 +0.010 +0.003 +0.010 6049704 473395.1 0.142 11.0 12.1 65.5 +0.000 +0.001 -0.015 -0.014 +0.001 -0.001 +0.005 6055382 511197.0 0.149 6.5 7.2 65.5 +0.003 +0.002 -0.009 -0.012 +0.009 -0.000 +0.003 6061088 517899.5 0.132 16.0 17.6 65.5 -0.001 +0.001 -0.011 -0.013 +0.016 +0.002 +0.004 6066724 530887.1 0.138 16.7 18.4 65.5 -0.001 -0.003 -0.005 +0.001 +0.019 +0.007 +0.009 6072419 483273.0 0.148 6.8 7.4 65.5 -0.000 -0.000 -0.004 -0.002 +0.012 +0.009 +0.007 6078232 506013.4 0.141 7.9 8.6 65.6 +0.005 -0.003 +0.006 -0.009 +0.008 +0.010 -0.001 6083744 492551.8 0.143 4.9 5.4 65.6 -0.005 -0.005 +0.009 -0.004 +0.028 +0.020 +0.017 6089423 525190.9 0.139 6.7 7.3 65.6 -0.005 -0.001 +0.023 +0.013 +0.007 +0.017 +0.031 6095093 499633.5 0.143 10.2 11.2 65.6 +0.005 -0.000 -0.008 -0.016 +0.026 +0.005 -0.006 6100773 530992.9 0.140 13.2 14.5 65.6 +0.000 +0.001 -0.006 -0.002 +0.021 +0.005 +0.009 6106443 505240.5 0.150 12.5 13.7 65.6 -0.003 -0.001 +0.001 +0.004 -0.001 +0.015 +0.015 6112124 508140.5 0.139 8.1 8.9 65.7 -0.008 +0.003 +0.012 -0.003 +0.006 +0.005 +0.028 6117785 503058.1 0.152 5.5 6.0 65.7 -0.001 +0.000 +0.008 +0.002 +0.007 +0.005 +0.014 6123480 523310.9 0.159 4.3 4.7 65.7 +0.001 +0.002 -0.005 +0.002 +0.020 +0.005 +0.012 6129143 533127.8 0.157 7.2 7.9 65.7 +0.003 -0.001 -0.008 -0.001 +0.017 +0.008 +0.004 6134814 516884.2 0.143 9.3 10.2 65.7 -0.000 -0.006 -0.001 -0.010 -0.000 +0.014 +0.008 6140483 516211.8 0.134 9.0 9.9 65.7 +0.000 -0.000 -0.009 -0.004 +0.007 +0.005 +0.005 6146153 475833.0 0.142 14.0 15.4 65.8 -0.000 +0.002 -0.005 -0.008 +0.025 +0.012 +0.010 6151825 505922.8 0.145 7.4 8.1 65.8 +0.002 +0.001 -0.009 +0.004 +0.027 +0.008 +0.003 6157495 539690.2 0.139 12.9 14.2 65.8 +0.001 +0.002 -0.005 -0.000 +0.005 -0.007 +0.010 6163167 518890.0 0.139 6.7 7.4 65.8 -0.001 -0.005 -0.007 -0.010 +0.013 +0.010 +0.007 6168838 522052.2 0.130 11.2 12.3 65.8 -0.002 +0.000 -0.013 -0.004 +0.018 -0.002 +0.014 6174514 536624.8 0.132 6.8 7.4 65.8 -0.006 +0.000 +0.010 +0.018 +0.013 +0.015 +0.031 6180194 542195.1 0.121 18.1 19.9 65.9 +0.003 -0.000 -0.013 -0.024 +0.011 +0.003 -0.000 6185866 513890.6 0.124 13.3 14.6 65.9 +0.004 +0.002 -0.016 -0.023 +0.018 +0.006 -0.006 6191528 530650.8 0.139 8.8 9.6 65.9 -0.001 +0.003 -0.003 -0.003 +0.012 -0.002 +0.015 6197214 508906.2 0.137 12.4 13.6 65.9 +0.000 -0.001 -0.001 -0.004 +0.015 +0.006 +0.008 6202886 507448.3 0.129 11.1 12.2 65.9 -0.001 +0.004 -0.016 -0.022 +0.011 -0.005 +0.005 6208573 511458.1 0.132 9.5 10.3 66.0 +0.005 +0.001 -0.009 -0.003 +0.018 -0.001 -0.002 6214227 536282.0 0.128 12.1 13.2 66.0 -0.003 -0.004 -0.005 -0.015 +0.010 +0.010 +0.011 6219896 504616.5 0.121 14.8 16.3 66.0 +0.004 +0.002 -0.011 -0.018 +0.014 +0.006 -0.004 6225569 530142.0 0.132 8.3 9.1 66.0 -0.003 -0.000 -0.006 -0.010 +0.003 +0.006 +0.015 6231248 523514.8 0.132 5.1 5.6 66.0 -0.001 +0.001 -0.009 -0.002 +0.009 +0.003 +0.012 6236921 520293.0 0.137 9.9 10.8 66.0 -0.001 +0.001 -0.005 -0.000 +0.014 +0.003 +0.015 6242605 520594.2 0.135 9.6 10.5 66.1 +0.000 +0.002 -0.007 +0.000 +0.018 +0.002 +0.009 6248259 527738.0 0.137 10.2 11.1 66.1 -0.003 -0.002 -0.006 -0.016 +0.009 +0.008 +0.013 6253932 516020.8 0.133 9.1 10.0 66.1 -0.003 -0.004 -0.006 -0.012 +0.004 +0.012 +0.016 6259611 529396.1 0.142 8.7 9.5 66.1 +0.007 -0.003 -0.012 -0.013 +0.028 +0.009 -0.004 6265270 550010.0 0.150 4.6 5.0 66.1 -0.002 +0.005 +0.001 +0.005 +0.017 -0.002 +0.020 6270943 548058.6 0.133 7.5 8.2 66.1 +0.006 +0.001 -0.012 -0.018 +0.018 +0.001 -0.008 6276613 509410.3 0.126 6.2 6.8 66.2 -0.004 -0.003 -0.015 -0.016 +0.018 +0.009 +0.012 6282283 535095.4 0.123 6.8 7.4 66.2 -0.006 -0.003 +0.006 +0.017 +0.007 +0.014 +0.024 6287954 546594.1 0.129 8.4 9.2 66.2 -0.002 -0.003 -0.006 -0.013 -0.007 +0.006 +0.010 6293625 505613.0 0.134 10.3 11.2 66.2 +0.000 +0.001 -0.018 -0.012 +0.024 +0.003 +0.005 6299314 512294.3 0.142 5.1 5.5 66.2 +0.002 +0.006 -0.004 -0.007 +0.018 -0.002 +0.005 6304971 514765.1 0.138 4.1 4.5 66.3 -0.002 -0.001 -0.013 -0.020 +0.002 +0.007 +0.011 6310641 508422.4 0.134 10.4 11.3 66.3 +0.003 -0.000 -0.010 -0.011 +0.012 +0.007 -0.001 6316311 537551.0 0.126 6.4 7.0 66.3 +0.001 -0.001 -0.005 -0.024 +0.009 +0.006 +0.001 6321980 529456.8 0.132 10.5 11.4 66.3 -0.002 +0.002 -0.006 -0.021 +0.016 +0.008 +0.010 6327651 528581.9 0.137 7.9 8.6 66.3 +0.000 +0.001 -0.015 -0.022 +0.016 +0.002 -0.001 6333332 530078.8 0.137 8.2 8.9 66.3 +0.002 +0.003 -0.015 -0.008 +0.015 +0.002 +0.001 6339009 535460.3 0.138 9.5 10.4 66.4 -0.003 +0.002 +0.006 +0.012 +0.013 +0.013 +0.022 6344681 542505.4 0.138 6.0 6.6 66.4 +0.006 -0.000 -0.005 -0.012 +0.016 +0.006 -0.003 6350352 523286.9 0.135 7.5 8.2 66.4 +0.002 +0.004 -0.011 -0.012 +0.024 -0.006 +0.003 6356032 523777.9 0.139 7.0 7.6 66.4 -0.004 +0.000 -0.005 -0.011 +0.006 +0.006 +0.013 6361702 550699.2 0.132 20.9 22.8 66.4 +0.001 -0.001 -0.010 -0.001 +0.016 +0.004 +0.004 6367389 543115.4 0.127 7.5 8.2 66.4 +0.003 +0.001 -0.017 -0.008 +0.031 +0.002 -0.000 6373085 508684.6 0.123 9.3 10.1 66.5 +0.000 -0.002 -0.007 -0.022 +0.023 +0.007 -0.002 6378731 511132.6 0.124 10.7 11.7 66.5 +0.002 -0.001 -0.012 -0.013 +0.024 +0.001 -0.002 6384394 516987.4 0.119 10.2 11.1 66.5 -0.005 +0.000 -0.012 -0.014 +0.018 +0.002 +0.011 6390088 501075.5 0.140 9.5 10.3 66.5 +0.000 -0.002 -0.002 -0.004 +0.012 +0.008 +0.009 6395743 490007.8 0.135 8.3 9.0 66.5 -0.003 +0.001 -0.005 -0.011 +0.010 +0.007 +0.013 6401413 530176.5 0.127 7.4 8.1 66.5 -0.002 -0.004 +0.001 +0.014 +0.013 +0.016 +0.017 6407084 538955.9 0.133 5.3 5.8 66.6 -0.003 -0.001 +0.004 +0.004 +0.006 -0.002 +0.018 6412771 533247.8 0.122 6.9 7.5 66.6 +0.007 +0.002 -0.015 -0.021 +0.009 +0.006 -0.007 6418424 546149.7 0.128 8.6 9.3 66.6 +0.000 -0.002 -0.010 -0.015 +0.013 +0.009 +0.007 6424095 527881.1 0.131 8.7 9.5 66.6 +0.002 +0.000 -0.009 -0.006 +0.016 +0.005 +0.001 6429766 536467.5 0.127 6.2 6.8 66.6 -0.002 +0.002 +0.003 +0.006 +0.009 +0.009 +0.021 6435438 533956.9 0.134 4.1 4.5 66.6 +0.009 +0.003 -0.007 -0.007 +0.014 -0.005 -0.009 6441105 542733.5 0.128 6.4 7.0 66.7 +0.001 -0.001 +0.008 -0.009 +0.015 +0.012 +0.010 6446786 499755.3 0.134 8.8 9.5 66.7 +0.001 +0.000 -0.003 -0.015 +0.016 +0.008 +0.002 6452456 515558.5 0.127 12.5 13.6 66.7 -0.002 -0.000 -0.009 +0.001 +0.014 +0.009 +0.014 6458134 536317.9 0.131 6.2 6.7 66.7 +0.005 -0.000 -0.010 -0.008 +0.008 +0.002 -0.008 6463831 533550.2 0.123 13.6 14.8 66.7 -0.003 -0.002 +0.016 +0.033 +0.017 +0.015 +0.026 6469486 512412.7 0.134 8.9 9.7 66.8 -0.002 +0.002 -0.000 -0.003 +0.017 +0.009 +0.014 6475183 529450.8 0.125 8.4 9.1 66.8 -0.004 +0.000 +0.004 +0.006 +0.023 +0.011 +0.022 6480833 532319.2 0.128 7.9 8.6 66.8 +0.002 -0.006 -0.001 -0.006 -0.001 +0.015 +0.014 6486505 499046.9 0.138 9.4 10.2 66.8 +0.002 +0.001 -0.012 -0.007 +0.021 +0.006 -0.000 6492177 537432.8 0.136 6.0 6.6 66.8 -0.008 -0.002 +0.003 +0.006 +0.010 +0.015 +0.025 6497847 510738.5 0.130 5.4 5.9 66.8 +0.000 +0.000 +0.003 -0.004 -0.000 +0.002 +0.010 6503516 511839.6 0.132 10.1 11.0 66.8 -0.000 -0.001 +0.008 -0.001 +0.014 +0.013 +0.009 6509188 531188.2 0.135 10.7 11.7 66.9 -0.002 +0.002 -0.015 -0.017 +0.010 +0.002 +0.007 6514859 537107.8 0.141 5.7 6.2 66.9 -0.009 -0.004 +0.013 +0.025 +0.019 +0.020 +0.034 6520536 513234.7 0.142 6.3 6.8 66.9 +0.000 -0.000 -0.007 -0.021 +0.009 -0.002 +0.007 6526201 511466.3 0.141 7.7 8.4 66.9 -0.003 -0.003 -0.012 -0.015 +0.005 +0.010 +0.012 6531873 493962.4 0.136 11.3 12.3 66.9 +0.001 +0.003 -0.014 -0.015 +0.026 -0.006 +0.002 6537551 496864.3 0.138 5.1 5.6 66.9 +0.002 -0.000 -0.023 -0.021 +0.021 +0.000 -0.003 6543221 501461.6 0.140 7.6 8.2 67.0 -0.004 -0.004 -0.001 -0.007 +0.013 +0.014 +0.017 6548890 521122.9 0.141 6.5 7.1 67.0 +0.005 +0.001 -0.015 -0.006 +0.019 -0.003 -0.003 6554561 510805.2 0.134 10.4 11.3 67.0 -0.003 +0.004 -0.005 -0.006 +0.012 -0.004 +0.019 6560232 474522.3 0.138 8.8 9.6 67.0 -0.004 +0.001 +0.007 +0.008 +0.018 +0.012 +0.023 6565902 493365.1 0.140 7.7 8.4 67.0 -0.005 -0.001 +0.009 +0.013 +0.023 +0.011 +0.026 6571591 532866.9 0.140 5.1 5.5 67.1 +0.001 -0.004 -0.012 -0.011 -0.001 +0.010 +0.002 6577261 522218.7 0.138 7.3 7.9 67.1 +0.002 -0.000 -0.005 +0.001 +0.015 +0.012 +0.005 6582934 547447.1 0.123 9.0 9.8 67.1 +0.001 -0.001 +0.006 +0.002 +0.015 +0.008 +0.014 6588619 531632.1 0.119 10.0 10.8 67.1 +0.000 -0.002 +0.002 +0.001 +0.020 +0.011 +0.011 6594290 499971.6 0.133 6.8 7.3 67.1 -0.007 +0.002 +0.005 +0.010 +0.015 +0.007 +0.026 6599953 471926.6 0.128 8.7 9.5 67.1 +0.003 +0.003 -0.001 -0.011 +0.030 -0.000 -0.001 6605633 519604.4 0.131 5.7 6.2 67.2 -0.005 +0.001 +0.010 +0.006 +0.030 +0.007 +0.024 6611294 491853.0 0.126 9.1 9.9 67.2 +0.002 -0.001 -0.004 +0.012 +0.015 +0.007 +0.009 6616974 475846.9 0.134 10.0 10.9 67.2 -0.001 +0.002 -0.013 -0.009 +0.014 -0.001 +0.011 6622642 524108.8 0.132 7.8 8.5 67.2 +0.001 -0.001 -0.004 -0.006 +0.009 +0.005 +0.010 6628321 560393.8 0.119 9.0 9.8 67.2 -0.000 +0.000 -0.002 -0.004 +0.010 +0.007 +0.011 6634048 517716.4 0.123 6.7 7.3 67.2 -0.002 +0.001 +0.001 +0.006 +0.013 +0.007 +0.019 6639662 529919.9 0.119 8.1 8.8 67.3 +0.003 -0.003 -0.012 -0.006 +0.016 +0.011 -0.000 6645391 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